Engineering

Dual Zoned Hardwall Cleanroom with Raised Floor for Semiconductor Application

Built to: house semiconductor machinery

Size: 49.2m² 

Type: Hardwall with cleanroom air conditioning (A/C)  

What did the client need?

Our client required a cleanroom to house precision technology machinery for a nanotechnology process, as well as a cleaning handling unit.

How did we help the client?

We designed a hardwall cleanroom with an ISO 14644-1 Class 6 zone to house the precision technology machinery system and an ISO 14644-1 Class 7 zone for the cleaning handling unit. Plus an ISO Class 14644-1 7 change area.

For their high precision process, our client required the floor to be a level platform into which they could install hydraulic machinery to control any vibrations.  We designed and installed a heavy grade, high density particle board raised floor. 

Safe entry and exit to the cleanroom is provided through steps to the raised floor and steel skinned hinged cleanroom doors.

How did the client benefit?

The client has a cleanroom with three ISO 14644-1 Class zones for equipment and change areas. Temperature control regulates temperature and humidity and the raised floor allows vibrations to be reduced – all creating a stable environment for a high precision process.

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